JPS632950U - - Google Patents

Info

Publication number
JPS632950U
JPS632950U JP1986095489U JP9548986U JPS632950U JP S632950 U JPS632950 U JP S632950U JP 1986095489 U JP1986095489 U JP 1986095489U JP 9548986 U JP9548986 U JP 9548986U JP S632950 U JPS632950 U JP S632950U
Authority
JP
Japan
Prior art keywords
film
pattern
substrate
transferred
expansion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986095489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986095489U priority Critical patent/JPS632950U/ja
Publication of JPS632950U publication Critical patent/JPS632950U/ja
Pending legal-status Critical Current

Links

JP1986095489U 1986-06-23 1986-06-23 Pending JPS632950U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986095489U JPS632950U (en]) 1986-06-23 1986-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986095489U JPS632950U (en]) 1986-06-23 1986-06-23

Publications (1)

Publication Number Publication Date
JPS632950U true JPS632950U (en]) 1988-01-09

Family

ID=30960077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986095489U Pending JPS632950U (en]) 1986-06-23 1986-06-23

Country Status (1)

Country Link
JP (1) JPS632950U (en])

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